纳米级划痕测试仪 (NST)

纳米级划痕测试仪纳米级划痕测试仪 纳米划痕仪主要用于界定膜基结合强度与薄膜抗划痕强度，适用的薄膜厚度一般低于800纳米。纳米划痕仪可以用于多种薄膜材料的检测分析，例如单层或多层PVD、CVD、PECVD薄膜，感光薄膜，彩绘釉漆，光学薄膜，微电子镀膜，保护性薄膜，装饰性涂层等等。基体可以为软质或硬质材料，包括金属、合金、半导体、玻璃、矿物、以及有机材料等。

特点

  • 金刚石划痕针头
  • 光学显微镜自动控制观测
  • 闭环载荷反馈控制
  • 划痕深度测量
  • 完全符合工业标准ASTM,D7187

选件

  • 多种划痕针头选择
  • 纳米或微米硬度测量模块
  • 真空、湿度与温度控制
  • 集成原子力显微镜或共焦显微镜三维成像

csm title 相关链接

csm title Related documents
Scratch Catalog
Products catalogs
Application Bulletin n°37

Physical characterization of coated surfaces - Part I : Instrumented Indentation
Application Bulletin n°34

Characterization of the scratch resistance of ceramic tiles
Application Bulletin n°32

Characterization of thermal spray coatings by  instrumented indentation and scratch testing Part II:  Indentation of plasma sprayed coatings
Application Bulletin n°30

Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates

Measurement of Acoustic Emission during Microindentation
Application Bulletin n°28

Characterization of thermal spray coatings by instrumented indentation and scratch testing: Part l
Application Bulletin n°27

Mechanical properties of ultrananocrystalline diamond (UNCD) films with an influence of the nucleation density on the structure
Application Bulletin n°15

- Characterization of Polymers
- Quality Control of Minidisk polymer topcoat with Nano Scratch Tester and Tribometer
- Nano Scratch method developed as reference test for polymeric automobile topcoats
- Failure properties of nail varnish investigated with the Micro Scratch Teste

Application Bulletin n°13

- Influence of tip size on the critical load during scratch testing with the Micro Scratch Tester
- Failure of TiN-coated polymer measured with the Pin-on-Disk Tribometer
- Nano-Scratch Tester (NST) for measurement of dielectric thin films

Application Bulletin n°12

- Micro-Electronic Applications
- Nano-Scratch Tester (NST) for characterizing anti-stiction coatings for Microsystems
- In-situ Integrated Circuit (IC) characterization with the Nano Hardness Tester (NHT)
- Quality control of Micro-Slit reflective coating with the Nano-Scratch Tester (NST)
Application Bulletin n°11

- Nanoindentation with spherical indenters for characterization of stress-strain properties
- Characterization of IC bonded gold wires with the Nano Hardness Tester (NHT)
- New Nano-Scratch Tester (NST) allows better magnetic hard disk characterization
Application Bulletin n°07

- Forthcoming Nano Scratch Tester (NST) for characterization of ultra-thin films
- Micro structured silicon wafers compared with the CSM Tribometer
- Combined NHT/SFM for investigating the tip defect of common indenters
Application Bulletin n°04

- Modified Pin-on-Disc Tribometer for controlled lubricant studies
- Diamond knife for MST characterization of coated optical fibers
- Controlling magnetic hard disk adhesion to ceramic substrates with the MST
- Scanning force microscopy of low load indentations into aluminum thin films