MEMS Application by CSM Instruments

Micro Electronics Mechanical System (MEMS)

Since 2000, we deepened the field of the MEMS. Our measuring instruments have been adapted according to the requests and the characterization of MEMS became a standard for CSM.

We characterized:

  • The Friction of Polysilicon Microshutter
  • The Hardness and elastic modulus of Bonding Pads
  • The delamination of Micro-Slit Reflective Coatings
  • Force constant as a function of position of accelerometers
  • Cracks on Printer Heads in pressure testing
  • Stiffness and displacement characteristics of micro switches
  • .etc.

Ask us for new applications!

 

 

 

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