Micro Electronics Mechanical System (MEMS)

Since 2000, we deepened the field of the MEMS. Our measuring instruments have been adapted according to the requests and the characterization of MEMS became a standard for CSM.

We characterized:

• The Friction of Polysilicon Microshutter
• The Hardness and elastic modulus of Bonding Pads
• The delamination of Micro-Slit Reflective Coatings
• Force constant as a function of position of accelerometers
• Cracks on Printer Heads in pressure testing
• Stiffness and displacement characteristics of micro switches
• .etc.

Ask us for new applications!