ナノスクラッチテスタ (NST)

Nano ScratchNano Scratch

ナノスクラッチテスタは、800nm以下の薄膜やコーティングの実用的な密着力を評価するのに特に適しています。ナノスクラッチテスタは、有機材料および無機材料、軟質および硬質のコーティングの分析評価に使用できます。たとえば光学用途から、マイクロエレクトロニクス用途、保護膜、装飾膜などさまざまな用途向けの、薄膜・多層膜のPVD・CVD・PECVD 膜、フォトレジスト、塗装、ラッカーなど多様な膜の評価です。金属合金、半導体、ガラス、反射材や有機材料を含む硬質あるいは軟質の基材も評価できます。

特長

  • ダイヤモンド・スタイラス（触針）によるスクラッチ手法
  • 光学マイクロスコープによる自動観察
  • 荷重アクチュエータのフィードバック制御
  • スクラッチ深さ計測
  • ASTM D7187準拠

オプション

  • 広範囲な垂直荷重領域のスクラッチ試験に対応するスタイラス
  • ナノ／マイクロ硬さ測定メソッド
  • 真空度、湿度、温度制御
  • AFMおよびコンスキャン3Dイメージング

csm title 関連リンク

csm title Related documents
Scratch Catalog
Products catalogs
Application Bulletin n°37

Physical characterization of coated surfaces - Part I : Instrumented Indentation
Application Bulletin n°34

Characterization of the scratch resistance of ceramic tiles
Application Bulletin n°32

Characterization of thermal spray coatings by  instrumented indentation and scratch testing Part II:  Indentation of plasma sprayed coatings
Application Bulletin n°30

Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates

Measurement of Acoustic Emission during Microindentation
Application Bulletin n°28

Characterization of thermal spray coatings by instrumented indentation and scratch testing: Part l
Application Bulletin n°27

Mechanical properties of ultrananocrystalline diamond (UNCD) films with an influence of the nucleation density on the structure
Application Bulletin n°15

- Characterization of Polymers
- Quality Control of Minidisk polymer topcoat with Nano Scratch Tester and Tribometer
- Nano Scratch method developed as reference test for polymeric automobile topcoats
- Failure properties of nail varnish investigated with the Micro Scratch Teste

Application Bulletin n°13

- Influence of tip size on the critical load during scratch testing with the Micro Scratch Tester
- Failure of TiN-coated polymer measured with the Pin-on-Disk Tribometer
- Nano-Scratch Tester (NST) for measurement of dielectric thin films

Application Bulletin n°12

- Micro-Electronic Applications
- Nano-Scratch Tester (NST) for characterizing anti-stiction coatings for Microsystems
- In-situ Integrated Circuit (IC) characterization with the Nano Hardness Tester (NHT)
- Quality control of Micro-Slit reflective coating with the Nano-Scratch Tester (NST)
Application Bulletin n°11

- Nanoindentation with spherical indenters for characterization of stress-strain properties
- Characterization of IC bonded gold wires with the Nano Hardness Tester (NHT)
- New Nano-Scratch Tester (NST) allows better magnetic hard disk characterization
Application Bulletin n°07

- Forthcoming Nano Scratch Tester (NST) for characterization of ultra-thin films
- Micro structured silicon wafers compared with the CSM Tribometer
- Combined NHT/SFM for investigating the tip defect of common indenters
Application Bulletin n°04

- Modified Pin-on-Disc Tribometer for controlled lubricant studies
- Diamond knife for MST characterization of coated optical fibers
- Controlling magnetic hard disk adhesion to ceramic substrates with the MST
- Scanning force microscopy of low load indentations into aluminum thin films