Micro Electronics Mechanical System (MEMS)
Since 2000, we deepened the field of the MEMS. Our measuring instruments have been adapted according to the requests and the characterization of MEMS became a standard for CSM.
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|Application Bulletin n°30||
Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates
Measurement of Acoustic Emission during Microindentation
|Application Bulletin n°20||
- Nano Tribometer Applications Investigation of lubrication regimes using ultra low contact pressures
|Application Bulletin n°12||
- Micro-Electronic Applications