Micro Electronics Mechanical System (MEMS)

Micro Electronics Mechanical SystemMicro Electronics Mechanical System

Since 2000, we deepened the field of the MEMS. Our measuring instruments have been adapted according to the requests and the characterization of MEMS became a standard for CSM.

We characterized:

  • The Friction of Polysilicon Microshutter
  • The Hardness and elastic modulus of Bonding Pads
  • The delamination of Micro-Slit Reflective Coatings
  • Force constant as a function of position of accelerometers
  • Cracks on Printer Heads in pressure testing
  • Stiffness and displacement characteristics of micro switches
  • .etc.

Ask us for new applications!

csm title Related documents
Application Bulletin n°30

Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates

Measurement of Acoustic Emission during Microindentation
Application Bulletin n°20

- Nano Tribometer Applications Investigation of lubrication regimes using ultra low contact pressures
- Adhesion and friction studies of materials for micro electro mechanical systems (MEMS)
Application Bulletin n°12

- Micro-Electronic Applications
- Nano-Scratch Tester (NST) for characterizing anti-stiction coatings for Microsystems
- In-situ Integrated Circuit (IC) characterization with the Nano Hardness Tester (NHT)
- Quality control of Micro-Slit reflective coating with the Nano-Scratch Tester (NST)