Micro Electronics Mechanical System (MEMS)

Since 2000, CSM has been addressing client's needs in the field of MEMS. Our measuring instruments have been adapted according to the requests and the characterization of MEMS became a standard for CSM.

A partial list of MEMS applications we have worked on:

> The Hardness and elastic modulus of Bonding Pads
> The delamination of Micro-Slit Reflective Coatings
> Force constant as a function of position of accelerometers
> Cracks on Printer Heads in pressure testing
> Stiffness and displacement characteristics of micro switches
> Friction of polysilicon microshutter

Please, tell us what your application might entail!